Radio-Frequency Capacitive Discharges
Autor
Yuri P. Raizer (Russian Academy Of Science, Moscow, Russia)
, Mikhail N. Shneider (Russian Academy Of Science, Moscow, Russia)
, Nikolai A. Yatsenko
Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.